Used DNS / DAINIPPON SC-W80A-AVQ #188553 for sale
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DNS / DAINIPPON SC-W80A-AVQ is a photoresist equipment, consisting of a modular processing tool that can support multiple types of photolithography applications, including single mask imaging and dual mask imaging (DM). The system was designed specifically to meet the demands of advanced semiconductor lithography processes, offering a high-precision, reproducible imaging solution that is capable of producing features of ∅40 nm or less. The unit is equipped with a state-of-the-art laser projection linewidth (LPL) capability, which is capable of generating sub-micron registration and imaging accuracy. It is also capable of producing precise alignment marks with reliable overlay accuracy within 3 nm at its best. The main component of the machine is the projection lens, which is designed to project a high-resolution image onto the wafer, with an effective field size of up to 335 mm. The lens tool utilizes a high numerical aperture (NA) of 0.82, which enables a high depth of focus and high resolution. The asset also features a motor-driven stage, which provides precise control over the alignment and image position on the wafer. The stage utilizes a pair of precision linear motor axes, allowing for fully-automated alignment of the image and the wafer. Furthermore, the model also features a temperature-controlled environment to ensure that the photoresist is properly exposed at the desired dose. DNS SC-W80A-AVQ also includes a sophisticated tool interface that provides a wide range of user-friendly features. It includes the ability to access pre-programmed recipes and monitor process status, as well as automatic process optimization and parameter settings that can automatically adapt to changing resist and substrate types. It also includes unique features such as curve-fitting, which enables the equipment to adapt to changes in resist characteristics, and an ultrahigh-accuracy exposure control capability that is capable of making precise dose adjustments using advanced predictive exposure techniques. Overall, DAINIPPON SCW-80A-AVQ is an advanced photoresist system that is designed to offer a reliable and precise imaging solution for advanced semiconductor lithography processes. It is equipped with a high-precision projection lens, motor-driven stage, temperature-controlled environment, robust tool interface, and several advanced features that can improve process accuracy and repeatability.
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