Used DNS / DAINIPPON SK-200W-AVP #9371671 for sale
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ID: 9371671
Wafer Size: 6"
Vintage: 1998
(2) Coater / (2) Developer system, 6"
(4) Open cassette load ports
Main controller
Plate
ADH
(10) HP
(5) CP / 2PCP
IFB
Chemical cabinet
Heater controller
Developer 1 and 2:
Developing nozzle: Spray nozzle
Top rinse: Single nozzle
Coater 1:
(4) PR Nozzles: R1-R4
EBR
Coater 2:
BARC
(3) PR Nozzles: R1-R3
EBR
1998 vintage.
DNS / DAINIPPON SK-200W-AVP is a state-of-the-art photoresist equipment that is designed for use in semiconductor fabrications. It is a single-side coating system that is able to dispense a precise layer of photoresist material without the need for a standing wave. This unit is capable of dispense thin layers of photoresist down to the submicron range. DNS SK-200W-AVP is equipped with a specially designed dispensing machine that can precisely control the dispense rate and dispense pattern of the photoresist materials. This tool is designed to use a combination of shearing, sweeping, and patterning techniques to accurately create the desired result. The asset is capable of achieving accuracy down to 0.01mm and is capable of dispensing materials as thin as 0.5 microns. DAINIPPON SK-200W-AVP also utilizes a dynamic vision model for image recognition. This equipment is able to identify a wide range of photoresist shapes and sizes and can accurately dispense the photoresist to the exact specifications required. This system is also capable of compensating for any environmental changes that may occur during the course of production. SK-200W-AVP is also equipped with a variety of advanced safety features. These include; safe custody temperature control, air filtration, and an integrated safety interlock unit. This interlock machine provides a physical barrier between the operator and the tool during operation. Additionally, the asset is also equipped with an automated model shutoff feature that ensures that any potentially hazardous situations can be addressed and avoided without additional intervention. Finally, DNS / DAINIPPON SK-200W-AVP is exceptionally user friendly. The intuitive, touch-panel based control interface allows users to quickly access the desired functions or settings. Furthermore, calibration settings can be easily adjusted and confirmed for each individual case, allowing for more consistent results. Overall, DNS SK-200W-AVP is a highly advanced photoresist equipment that is designed to provide superior results in a variety of different applications. Its precision control system, dynamic vision unit, and user friendly design make it ideal for any number of semiconductor fabrication processes.
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