Used DNS / DAINIPPON SK-80BW-AVPF #9354131 for sale
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ID: 9354131
Wafer Size: 6"-8"
Vintage: 1998
(2) Coater / (2) Developer system, 6"-8"
Hot / Chill plates (7-26)
MICROBAR TrackMate chemical cabinet
(3) Control racks
1998 vintage.
DNS / DAINIPPON SK-80BW-AVPF is an advanced photoresist equipment used in semiconductor device fabrication. It combines advanced maskless lithography technology with cutting-edge photoresist chemistry to produce superior line, space, and pattern resolution. The system utilises KrF laser direct image projection technology, allowing for precise and reliable lithography on a wide variety of wafer substrates. This optimises the performance of conventional lithography, resulting in reduced manufacturing costs, improved yields, and shorter cycle times. DNS SK-80BW-AVPF photoresists have been designed to provide superior resolution and line edge control. The unit incorporates an advanced inorganic light absorber which attenuates the minimum laser wavelength of 248nm for improved pattern fidelity and accuracy. It also features proprietary photopolymerisation technology, which provides greater modulation of light intensity over the entire exposure range. Combined, these features result in higher contrast, reduced pattern distortion, less image noise, and improved dimensional accuracy. An additional benefit is that the machine is compatible with various post-processing techniques such as wet etching and dry etching. This ensures that all semiconductor device fabrication processes can be easily integrated with DAINIPPON SK 80BW-AVPF photoresist systems. Overall, SK-80BW-AVPF photoresist tool is an ideal solution for device fabrication requiring precise line trace and edge control. Its extended resolution capabilities, combined with superior light attenuation, make it an efficient and low-cost process for the production of high-quality semiconductor devices. The wide selection of post-processing techniques makes the asset suitable for a variety of device fabrication techniques, covering a wide range of applications in electronics and nanotechnology.
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