Used DNS / DAINIPPON SK-80BW-BVP #9182582 for sale
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ID: 9182582
Wafer Size: 8"
Vintage: 1997
(2) Coater / (3) Developer system, 8"
(2) Resists coater stations
ARC Coater station
Interface to NIKON NSR S203B Scanner
DUV-Resist
Housing with FFU
FTC
(2) Microbar trackmates
Scanner interface
Power supply: 208 V, 4.0 kW, 60 Hz, 4.0 A
1997 vintage.
DNS / DAINIPPON SK-80BW-BVP is a photoresist equipment designed for using in the production and development of thin-film microelectronic devices. It enables superior lithographic performance for resolution and critical dimensions, allowing for high-quality, reliable and repeatable structures for device fabrication. The system consists of a DI-3000E direct projection aligner and a SK-80BW image oscilloscope. The DI-3000E utilizes the latest in optics and computer technology to achieve high-accuracy and repeatability of alignment during device fabrication. It uses a laser-based alignment unit to perfectly align the substrate to the photomask, and uses an LED to ensure that the alignment is perfect. The machine also has advanced auto-correction capabilities which make alignment very precise. The SK-80BW image oscilloscope uses a vacuum photomask which is illuminated by a broadband laser, and a special stacked film arrangement which contains imaging optics and a light shield. The light shield ensures that the light from the laser is reflected in a controlled and consistent pattern, enabling high-resolution structures to be developed. The film is used for separating the functional components of devices, such as AZOX layer and metal layer. The combination of the DI-3000E and the SK-80BW image oscilloscope provides excellent lithographic performance, which makes this tool ideal for device fabrication applications that require high-resolution, reliable and repeatable structures. With its advanced optics, computer technology and light-shield, this asset provides precision and performance needed to ensure reliable and consistent device performance. It also has a wide range of applications, including biomedical devices, solar cells, sensors, and display materials.
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