Used EBARA UFP 300A #9185406 for sale
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EBARA UFP 300A is a photoresist equipment designed to develop high throughput processes for advanced semiconductor applications. EBARA UFP-300A offers advanced process capabilities, such as etch rate control, photoresist planarization, and lithography repair, for silicon wafer manufacturing. The system consists of three components: a photoresist sprayer, a mask aligner, and an associated platform. The photoresist sprayer in the unit is designed to control the thickness, uniformity, and reliability of the resist coating. The mask aligner is used to align masks, apply patterning, and make contact with the silicon wafer. The platform provides the interface between the sprayer and the mask aligner. This platform includes a wafer handling unit with a variable speed robot arm, a vision steering machine, and a linear positioner that controls the motion of the robot. The platform is controlled by a user-friendly graphical user interface, which makes it easier for operators to use the tool. UFP 300A is equipped with a digital asset control unit that controls the various functions of the model. This control unit is capable of calculating the operating conditions of the equipment, as well as adjusting the speed of the robot arm. It also enables the operator to check the status of each device in the system. Additionally, the control unit is also capable of displaying data on the unit's performance, such as the adherence rate of the photoresist on the wafer, the etch rate of the photoresist, and the overall throughput of the machine. UFP-300A offers a wide range of features designed to improve the yield of the semiconductor manufacturing process. It is equipped with a high-speed auto aligner for faster substrate handling and improved reliability. The tool also includes a debris removal asset and an automatic photoresist stripping unit to reduce downtime. Additionally, the model's high-precision pattern transfer equipment is designed to ensure accurate results. EBARA UFP 300A is also ideal for high volume production runs due to its scalability and flexibility. The system can be customized to meet the customer's needs, including customized components, accessories, and options. The unit can easily be adapted for different applications, enabling the production of both single-layer and multi-layer designs. EBARA UFP-300A also features an advanced tracking machine for monitoring and optimizing the process. Overall, UFP 300A is an innovative photoresist tool with a wide range of features designed to maximize the efficiency and yield of the semiconductor manufacturing process. The asset is designed to meet the demands of advanced semiconductor applications, offering high throughput processes and reliable results.
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