Used ELS TECHNOLOGY ELS-306MA #9059475 for sale

ELS TECHNOLOGY ELS-306MA "Desmear Equipment" is a photoresist system designed by the leading photoresist developer ELS TECHNOLOGY. Photoresist is a light sensitive material used in semi-conductor manufacturing to provide pattern definition. ELS-306MA Desmear Unit is a 3-in-1 machine with integrated functions including baking, exposure and development, serving as a comprehensive integrated solution for photoresist production. The tool features a highly integrated single process chamber, for optimal integration and space saving. The process chamber is tailored to suit photoresist processes, and offers excellent handling capabilities, such as load lock technology and standard wafer handling for substrates up to 200mm. The process chamber also features fast bake times, providing in the range of 1-2 minutes for baking of samples. Additionally the chamber has an in-situ light monitoring asset, and integrated diffraction grating, enabling the elimination of linewidth variations and quality problems caused by imprecise parameters. ELS TECHNOLOGY ELS-306MA also supports a wide range of exposure tool options, such as Quadrascan, various laser marking sources, and EB Resist patterning. The machine is supported by a powerful software package, enabling the easy set up and customisation of recipes. This includes an easy-to-use graphical user interface, integrated batch processing capabilities, and pre-installed recipes for over 50 processes. Furthermore, ELS-306MA Desmear Model features excellent up-time and reliability, ensuring continuous and problem free operation. The equipment has integrated safety functions such as overpressure protection, thermal monitoring, and over-current prevention. It also features self-diagnostic capabilities and integrated process tracking, for convenient monitoring of processes. Last but not least, ELS TECHNOLOGY ELS-306MA provides excellent value for money, thanks to its integrated multi-functionality, fast processing speeds, and reliable performance. The compact design and integrated features are also ideal for production in limited space, meaning there is no need for extra assembly or wiring.