Used EVG / EV GROUP 105 #293761363 for sale
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ID: 293761363
Wafer Size: 2"-12"
Bake module, 2"-12"
Manual wafer loading
Hot plate bake temperature: 150°C
SEMI Standard
Hot plate cover
Simultaneous bake:
Up to (9) wafers
Up to 100 mm size
Bake process: Soft / Post exposure
Wafer fixation via vacuum
Load and unload pneumatic lift pins
Temperature controller
Power supply
Solvent exhaust connection
Standalone.
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