Used EVG / EV GROUP 120 #9229820 for sale

EVG / EV GROUP 120
Manufacturer
EVG / EV GROUP
Model
120
ID: 9229820
Automated resist processing system.
EVG / EV GROUP 120 is a photoresist equipment used for the creation of micro- and nano-scale features for the fabrication of integrated circuits and other advanced, high-precision applications. It is equipped with an ultra-high precision optics table, high-accuracy motorized stages and patented high-quality resolution imaging technology. The system uses lithographic processes to create nano-structures. A photoresist is a light-sensitive material that is applied in a thin layer to the substrate. The photoresist layer is exposed to light, which causes a chemical reaction and allows patterns to be created by selectively etching away sections of the layer. The process is repeated until the desired pattern is formed. EVG 120 features a micron-precision orthogonal motorized stage for pattern alignment. This unit allows for extremely accurate and repeatable alignment of the substrate to the optics table, which is essential for the precise pattern alignment. It also features a patented imaging machine that produces features down to 100 nanometers, with a Noise Level of ≤0.1nm RMS per Zone. This allows the user to produce highly accurate and detailed images with very low defect rates. The tool is compatible with a variety of photoresists, including positive tone, negative tone and binary resist. It is suitable for a wide range of applications, including microelectronics, MEMS (microelectromechanical systems), optoelectronics and sensors. EV GROUP 120 is an extremely precise, reliable asset that is suitable for the production of a variety of nanostructures. Its advanced optics table, high-accuracy motorized stages and ultra-high precision imaging model enable the creation of intricate features with extremely low defect rates. This equipment is a valuable tool for any organization producing integrated circuits or other small-scale structures.
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