Used EVG / EV GROUP 150 #293615061 for sale

Manufacturer
EVG / EV GROUP
Model
150
ID: 293615061
Coater system.
EVG / EV GROUP 150 Photoresist equipment is a state-of-the-art photoresist development system that allows for rapid transfer of photoresist patterns to substrates. It is designed for commercial and semiconductor applications, and offers the advanced features needed for precise resist coatings and patterning. EVG 150 unit combines the flexibility of a film applicator with the accuracy of a stepper. It is highly adaptable, as it is capable of working with a variety of resist thicknesses, pattern pitches and substrates. The machine has a range of processing capabilities, and includes coating, memory placement, exposure, development, and other post-process steps. The photoresist tool is equipped with a unique web transport mechanism and belt-driven metrology that makes it capable of creating a high-quality, uniform coating of resist over large areas quickly and uniformly. The asset is composed of three components: an oven, transfer chamber and exposure model. The oven is used to preheat the substrate in order to facilitate resist coating and patterning. The transfer chamber contains the web transport mechanism, which adds a layer of resist to the substrate. The exposure equipment focuses UV light onto the resist pattern, which is subsequently developed to create the desired image. The system has a number of features designed to ensure high-precision results. For example, the XY stage is designed with a high-resolution encoder, which allows for precise placement of resist patterns on substrates. The software utilizes powerful algorithms and autonomous pattern placement that can compensate for tolerances and process variations. Additionally, the unit is equipped with a patented pattern overlay verification machine, which uses imaging technology to evaluate pattern fidelity. EV GROUP 150 photoresist tool is a powerful tool for creating finely detailed patterns on substrates. It is reliable and easy to use, and offers the accuracy, flexibility and advanced features required for creating high-quality results.
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