Used EVG / EV GROUP 150 #293617649 for sale

EVG / EV GROUP 150 is a photoresist equipment designed for photolithography applications. This photoresist system is designed for use in a variety of industries, including semiconductor, telecommunications, and medical device manufacturing. The unit is composed of two modules, the Processor Module and the Substrate Processing Module. The Processor Module is designed to provide the required process steps for photoresist materials. It contains a configurable integrated camera that can be used for tool alignment and for recording the results or images of the process. The Substrate Processing Module is designed to hold, transport and handle individual substrates, allowing for uniform and repeatable process steps. The Processor Module of the machine is capable of controlling multiple process steps such as pre-exposed and post-exposed resists, developer, cleaning, and soft bake processes. This module also offers an integrated vision tool with auto-focus, auto-alignment and auto-exposure features. This asset also allows for evaluation of the resist profile in-situ and optimization of resist profiles and imaging parameters. The Substrate Processing Module is designed to handle multiple substrates and processes in a parallel manner. It can act as an inline or batch process, depending on the application. It offers a range of substrates such as wafers, panels, or other large-area structures and various parts of the process can be individually adjusted or monitored. It also has a flexibility sensor for testing the resist profile and for detecting mechanical defects. The model also offers a wide range of safety measures such as safety shields for UV protection, as well as a programmable safety routine with multiple sensors and alarms. Additionally, it contains a diagnostic routine and an IV curve trace equipment with an open platform that allows integration of user-defined characterization routines. In conclusion, EVG 150 Photoresist System offers capabilities that make it suitable for use in a variety of industrial photolithography applications. It is a configurable and user-friendly photoresist unit with a range of process control capabilities and safety measures. The machine can be used for a wide range of applications including semiconductor, telecommunication, and medical device manufacturing.