Used EVG / EV GROUP 150 #9289394 for sale

EVG / EV GROUP 150
Manufacturer
EVG / EV GROUP
Model
150
ID: 9289394
Vintage: 2007
Coater systems 2007 vintage.
EVG / EV GROUP 150 is a photoresist equipment designed for wafer-scale fabrication. It consists of a series of different modules, each with its own purpose. The main components of the system include a wafer station, a hot plate, a light source, a control station, and an environmental chamber. The wafer station allows for the loading and unloading of wafers, as well as alignment and cleaning procedures. The hot plate is used to heat the substrate prior to the exposure process, while the light source is used to create the desired pattern on the wafer. The control station allows the user to adjust parameters such as pattern size, shape, and exposure time, as well as to monitor the process. Finally, the environmental chamber is used to maintain a controlled environment for the entire exposure process. The photoresist unit can achieve up to 12-inch substrates with a resolution of 1 micron. The machine is capable of various processes such as annealing, differential etching, and wafer thinning. It is also equipped with different exposure techniques such as single shot, stepper, and matrix. The evanescent illumination capabilities allow for the production of 3-dimensional designs with a resolution of up to 0.2 microns. The tool is also user-friendly and can be operated from a remote control. It also has a built-in screen, allowing easy monitoring of the process. The asset also has an automated surveillance and warning model that reports any issues during the process. In conclusion, EVG 150 is a reliable and user-friendly photoresist equipment that is suitable for wafer-scale fabrication. It has a resolution of 1 micron and can fabricate up to 12-inch substrates with various exposure techniques. It is also equipped with an automated surveillance and warning system for easy operation and monitoring of the process.
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