Used EVG / EV GROUP 301 #293606591 for sale
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EVG / EV GROUP 301 is the ideal equipment for photoresist lithography and is an advanced technology for photomask and transfer processes in the nano- and microelectronic manufacturing industry. It is designed for the accurate and precise alignment of patterning and exposure processes on microelectronic surfaces. This photoresist system enables high-resolution, fully automatic lithography, with extremely narrow feature sizes of up to 6 µm, which is unprecedented in the industry. It is also extremely reliable, capable of working with high-vacuum and excellent feature resolution capabilities. EVG 301 photoresist unit is equipped with multiple features, enabling it to handle a variety of wafer sizes up to 200 mm. It has a high-power UV light source for exposing the wafers and a pattern projector for the projection of the pattern onto the wafers. The machine is also capable of controlling the exposure dose, position, focus and zoom. Furthermore, it is built with a number of sensors and feedback systems, which ensure a high level of accuracy and precision for the positioning and exposure processes on the wafers. The tool is also equipped with integrated controls for dose timing and positioning, as well as for metrology and patterning. This allows for complete control and regulation of the entire lithography process, from alignment and exposure to printing. Additionally, the asset includes an automatic cleaning cycle, which periodically cleans the photomask and wafer surfaces, ensuring repeatable and accurate results. EV GROUP 301 photoresist model is extremely user friendly and provides a number of benefits to the user. It is capable of producing extremely high resolutions images with feature sizes as small as 6 µm, and is designed to operate in both shortwave and mid-wave ultraviolet light and vacuum chamber environments. It also provides accurate registration data and can be used to control the patterning and exposure processes, eliminating the need for manual intervention and ensuring consistent high-quality results.
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