Used FSI EXCALIBUR #293759465 for sale
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ID: 293759465
Wafer Size: 8"
Vintage: 1994
Batch wafer processing system
1994 vintage.
FSI EXCALIBUR is a photoresist equipment that is used for the creation of monolithic devices, ultra-fine circuit patterns, and high-accuracy structural dimensions. The system combines the use of photomask, resist and laser processing to create the desired results. The photoresist unit uses liquid photoresist, which is then exposed to ultraviolet light. This results in a patterned resist film. The film is further processed with a laser machine and a scanning stage which are used for in-process imaging, electrical analysis, and surface topography. The laser tool can be used for precision ablation, as well as to cut etched lines in the resist film. The resist can then be removed in order to create the desired pattern. The asset's photomask is a flat plate upon which a desired circuit or structural pattern is placed. This pattern is then exposed to the liquid photoresist. The laser model is then utilized to project the desired pattern into the resist film, which then etches the pattern into the resist film. The equipment is also used to monitor and control the process of etching, via a computer-controlled system. This ensures the accuracy of the results and ensures the highest accuracy level of the developed device. Furthermore, the unit is equipped with built-in software for 3D imaging and data analysis, which provides detailed post-process analysis capabilities. Overall, EXCALIBUR is a photoresist machine that provides a simple and yet highly accurate method for creating device structures. Its use of photomask, resist films, and laser processing produces extremely precise structures with a high level of accuracy. Its 3D imaging and data analysis capability guarantee accurate results, making it ideal for creating high-precision devices and ultra-fine circuit patterns.
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