Used FSI EXCALIBUR #293815451 for sale

FSI EXCALIBUR is a photoresist equipment for semiconductor manufacturing which utilises state-of-the-art technology to deliver reliable, efficient and cost-effective lithography capabilities. Based on advanced chemistry and custom-designed hardware, the system offers high-performance resolution, repeatability and unit down-time, enabling cost-effective device production and reducing cycle times for every step in semiconductor manufacture. The core of EXCALIBUR machine is a proprietary photoresist formulation which provides strong adhesion, high resolution and minimal loss of pattern transfer over multiple shots. The formulation features a proprietary blend of polymers, cross-linking agents, photochemicals and solvents, which together delivers the required performance. After dispensed onto the substrate, the resist enters FSI EXCALIBUR exposure process, which uses a direct imaging mask aligner and a unique exposure program developed to ensure the highest possible resolution and image fidelity. The substrate is then developed, either through flood-process or via a static or dynamic spray dispense process. In addition to the photoresist tool, EXCALIBUR platform also features in-situ instrument control and fast and accurate inspection to deliver repeatable and reliable results over multiple shots. This ensures that designs remain unchanged and that production cost will remain low. Furthermore, the proprietary development and wet-cleaning processes are designed to fully eliminate pinholes and photoresist residues to guarantee reliable results for the duration of any fabrication process. FSI EXCALIBUR platform also offers a highly configurable interface, allowing for easy adjustment and calibration. This enables users to quickly and accurately tailor the asset's functions to the required substrate and process, ensuring the greatest levels of productivity and cost efficiency. In summary, EXCALIBUR photoresist model is an all-in-one solution to semiconductor manufacturing, delivering excellent results with the greatest levels of productivity and cost efficiency. Thanks to its custom-designed hardware, proprietary photoresist formulation, and sophisticated in-situ instrument control and inspection, FSI EXCALIBUR equipment is able to drive every step of the lithography process and deliver reliable and repeatable results.