Used FSI / TEL / TOKYO ELECTRON 8221 #9119346 for sale

FSI / TEL / TOKYO ELECTRON 8221 is a photoresist equipment developed for use in semiconductor chip production. It is a fully automated system that provides both substrate preheating and processing of the resist layers in the manufacture of devices using thin film deposition techniques. FSI 8221 unit can process substrates up to 8 inches in diameter with a process window of 120°C to 200°C. It features a unique heating machine which enables uniform temperature control and ensures consistency and repeatability of the process. It is equipped with two Irradiation Sources - a Xenon flash lamp for up to 2 J/cm² and an Argon laser for up to 400 mJ/cm² dose. The tool is complete with a wavelength selectable quartz optics assembly and a variable reflector to adjust the beam profile. TEL 8221 photoresist asset can be used for single layer, multilayer and dual layer processing. It has a precise approach to controlling the process parameters and ensures excellent dispersion and resolution of the resist layers. A selection of multicomponent resist formulations are available, from semi-durable to high durability systems, along with all necessary disposables for successful processing. In addition, the model features advanced metrology and inspection tools such as field-of-view microscopy, particle density measurements and electrical resistivity measurements. These techniques can be used to evaluate the performance of the resist layers over their expected lifetime, to ensure process and product consistency. To guarantee the highest yields from their substrates, users of 8221 photoresist equipment benefit from state-of-the-art process control and monitoring functions. The full-color interactive user interface provides an easy and intuitive workflow for parameter setting, equipment adjustments and evaluation of components. In conclusion, TOKYO ELECTRON 8221 is a high-performance photoresist system designed to guarantee the highest yields for semiconductor chip production. It offers an integrated heating unit, precise process control and advanced metrology and inspection tools to ensure optimal product quality.