Used FSI / TEL / TOKYO ELECTRON Antares CX #293652980 for sale
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FSI / TEL / TOKYO ELECTRON Antares CX is a photoresist equipment designed for use in semiconductor manufacturing processes. This system utilizes the principles of ion implantation, chemical etching, and spin coating to ensure the highest quality photoresist layers onto various materials. The unit includes a precise ion implanter that implant ions into the photoresist layer to create predetermined patterns. The pattern created is called the transfer etch pattern and the photoresist itself is then used to create the desired mask layer. This protective layer is then etched onto a number of material substrates to create the structure. A spin coat application is included in the machine to ensure the uniform distribution of photoresist onto the substrates. This process takes place in a high-quality, temperature-controlled environment to ensure the highest precision. FSI Antares CX offers a wide range of tool adaptations to meet any customer specifications. The asset features optional additional equipment as well as support components for extending its capability. This includes additional precision anvils, high-density ion-beam systems, and electron beam systems which are designed to provide the highest level of precision and control for various applications. For increased throughput, the model includes automated functions that are designed to reduce the time it takes to complete photoresist processing as well as improve its overall accuracy. The equipment also includes multiple operating modes and can be adjusted for different jobs and tasks. TEL Antares CX is an ideal photoresist system for any semiconductor fabrication process offering consistent and reliable results, along with increased throughput and improved quality. The unit designs are also customizable for individual user requirements.
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