Used FSI / TEL / TOKYO ELECTRON Antares CX #9169544 for sale

FSI / TEL / TOKYO ELECTRON Antares CX
ID: 9169544
Wafer Size: 8"
Cryokinetic cleaning systems, 8"
FSI / TEL / TOKYO ELECTRON Antares CX is a specialized photolithography equipment designed for the etching and patterning of microelectronic devices. The system combines photo-masking technology with subwavelength-resolution photolithography to create tight and intricate device structures. At its core, the unit employs lasers and a photoresist, which are materials that are sensitive to light. When exposed to the right wavelength of laser light, the photoresist will react and etch tiny patterns onto a substrate. The photoresist is further supported by a stepper-stage, a precision mechanical assembly which allows the substrate to move in X-Y-Z direction in order to align the photoresist perfectly for patterning. FSI Antares CX allows for extreme precision. It has the ability to pattern sub-wavelength shapes and patterns, as small as 25nm, making it ideal for the creation of advanced microelectronic structures. The laser used in the machine is also capable of topography measurement, making it easy to etch with great detail. In addition, the tool is able to perform double-exposure lithography to create the presence of a conductive bridge between two circuit elements. TEL Antares CX is also equipped with a software component called 'Sortimos' which can handle the entire process of beam scan, photoresist treatment, and patterning. This software is capable of automatically controlling the laser scan rate, laser power, and exposure time in order to obtain the most accurate, consistent result. The software is also capable of helping the user determine the proper exposure times for a variety of photoresist types, significantly streamlining the workflow. All in all, Antares CX is a highly advanced photolithography asset designed for micron-level device structure etching. It utilizes lasers, photoresist, and precise mechanical displacement in order to accurately pattern intricate structures as small as 25nm. The 'Sortimos' software helps to ensure accuracy and consistency throughout the process, making TOKYO ELECTRON Antares CX the optimal choice for microminiaturization and device structure creation.
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