Used FSI / TEL / TOKYO ELECTRON Antares #9302856 for sale

FSI / TEL / TOKYO ELECTRON Antares is a photoresist equipment specifically designed for production grade processing of integrated circuits and other microelectric products. The photoresist system is designed to provide enhanced accuracy and high repeatability during the lithography process. A photoresist is a light-sensitive material which reacts to the energy emitted by an electron beam. When exposed to light, it undergoes a chemical reaction that changes its physical properties, resulting in a resistive layer that enables certain parts of the design to be affected. FSI Antares unit makes use of advanced, high-resolution photoresist technology to ensure seamless image transfer and high-yield patterning of device layers. TEL Antares machine incorporates an automated end to end control tool that ensures precise process control. The asset features dynamic patterning operation capabilities that allow high-speed generation of high-quality resist patterns, with steep sidewalls that are essential for achieving high yields. An additional feature of the model is the ability to accurately control the linewidth of the exposed patterns down to a resolution of 1/4 micron. This feature also allows for precise overhang control for optimal sidewall planarity and gate profiles. In addition, TOKYO ELECTRON Antares equipment features a wide array of process support, including temperature monitoring and resistance measurement, allowing for advanced control of all deposition and etching processes. The system also offers flexible loading templates and wafer mapping capabilities for precise edge-to-edge deposition, allowing for accurate feature replication across the entirety of the wafer. Antares photoresist unit has been adopted by many major semiconductor companies seeking to produce high quality, consistent devices for their products. The advanced control machine and attention to detail allow for a more efficient fabrication process, allowing for higher yields and stable, repeatable device characteristics.