Used FSI / TEL / TOKYO ELECTRON Antares #9399693 for sale
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FSI / TEL / TOKYO ELECTRON Antares photoresist equipment is an innovative solution for the photolithography process used in the fabrication of semiconductor devices. The system utilizes a patented dual-layer "elephant skin" method of patterning photoresist layers on semiconductor wafers. The upper resist layer acts as a mask against the photoresist to pattern desired features on the surface while the lower resist layer provides a further treatment to create desired patterns and features. FSI Antares photoresist unit uses a trademarked E-beam technology with two laser sources to achieve the desired patterning without any burning of the photoresist layer. The two laser sources—one parallel and one perpendicular—produce a pattern of holes and peaks on the photoresist layer in order to form the desired pattern. The unique E-beam machine of TEL Antares allows for much higher accuracy of the patterning resolution than other photoresist systems, as the holes can be accurately placed over the peaks, with no bleed or unevenness in the pattern. In addition to the E-beam technology, Antares tool also utilizes a high-vacuum environment to prevent any oxidation of the photoresist layer. This helps to prevent corrosion due to the intense light exposure and also preserves the crystalline structure of the photoresist. TOKYO ELECTRON Antares asset is also resistant to photosensitive contamination, which is a common problem in photolithography. To ensure the quality of the patterns, the model features an automated monitoring equipment to identify any particles that may contaminate the layer of photoresist. Finally, FSI / TEL / TOKYO ELECTRON Antares photoresist system is highly cost-effective as it reduces equipment and cost expenditures as well as tedious manual processes associated with manufacturing and testing. This makes the unit particularly attractive to semiconductor companies looking to reduce costs while simultaneously improving their product quality. Overall, FSI Antares photoresist machine is an advanced solution that offers significant benefits to those in the semiconductor industry. The superior patterning accuracy, high-vacuum environment, anti-contamination feature, and cost effectiveness provide a reliable, high-quality solution for fabricating semiconductor devices.
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