Used FSI / TEL / TOKYO ELECTRON Carts for Saturn MP #9233650 for sale

FSI / TEL / TOKYO ELECTRON Carts for Saturn MP is a high performance photoresist equipment developed by FSI International,TEL and Lam Research. It is an automated process solution designed to provide excellent film deposit results, a small footprint, and maximum flexibility. The system utilizes a regulated nitric acid vapor delivery unit to spray photoresist material onto the wafer. The wafer is then exposed and processed to an ultra violet light source. The machine is designed with a 'dual' chamber layout, meaning the tool utilizes two vacuum chambers. The front chamber holds a large volume of vacuum pressure, and is used to hold the photoresist material in optimal condition before it is dispersed on the wafers. This chamber is also used for pre-treatment of the wafers before exposure. The rear chamber is used for exposure to the ultra violet light source. This chamber is also equipped with multiple cartridges so multiple wafers can be processed at once. The Saturn MP asset is capable of providing excellent thickness uniformity, flexibility, and fast response times. It is also equipped with multiple process controls for on-the-fly adjustments. The heated chamber is capable of temperatures up to 650°C, and the model can be fitted with a plasma etch chamber for additional process flexibility. The integrated tool is designed to reduce overall processing time - up to 70%. The ultra low damping feature allows for dynamic process adjustment with minimal vibration and minimized disturbance. Its monitor/alarm equipment provides real-time reporting of system health and performance. The Saturn MP unit also features advanced optional features, such as an integrated multiple-wafer loader or robotic arm, or an on-board gas delivery and recovery machine. Additionally, the integrated recipe tool allows for the flexibility of storing up to fifteen different process recipes that can be accessed with the simple push of a button. In conclusion, FSI Carts for Saturn MP asset is an intelligently designed automated process solution that offers excellent film deposit results, small footprint, and maximum flexibility. It is a powerful tool for any photoresist designer.