Used FSI / TEL / TOKYO ELECTRON Mercury MP #192650 for sale

FSI MERCURY MP is a high-performance digital photoresist equipment designed to deliver reliable, repeatable performance in production environments. The system features a proven high-resolution optical imaging source combined with advanced process control algorithms for precision micro-patterning. It is well suited for ultra-fine line applications in advanced semiconductor device manufacturing. The unit's resolution is one-thousandth micron or better and it can handle multiple layers with precision liner spacing of five or more microns for superior image quality. It features an advanced, high-resolution optical imaging source with FSI proprietary Universal Pattern Generator (UPG) technology and patented process control algorithms. The integrated machine performs focused-ion-beam (FIB) alignment and patterning, enabling users to achieve uniform line widths and spacing on multiple layers. The tool also features optimized, integrated process recipes to provide optimal results across all types of substrates. It has integrated, high-specification optics that enable device patterning at high aspect ratios and features that are smaller than the imaging wavelength. This asset also offers multiple rinse options, anti-reflective coatings, and a range of shielding materials suitable for specific process requirements. MERCURY MP is designed to maximize yield and minimize cycle time. The model is engineered and maintained to the highest standard of quality, with integrated sensors and data logging tools to ensure that all incidents and operating parameters are tracked. It also includes a variety of on-board process recipes. The equipment provides a comprehensive software suite for process monitoring and control that is updated with every new release to ensure compatibility with the latest technologies. This is combined with advanced hardware monitoring, feedback system and intelligent step-by-step process optimization algorithms to maximize quality control and repeatability. Overall, FSI MERCURY MP offers a comprehensive, sophisticated solution for high-precision photoresist applications. It is designed to deliver reliable, repeatable performance in production environments while maximizing yield and reducing time-to-market.