Used FSI / TEL / TOKYO ELECTRON Mercury MP #293595917 for sale

FSI / TEL / TOKYO ELECTRON Mercury MP is a photoresist equipment designed for use in the production of high-precision patterns on semiconductor, microelectronic, and other substrates. The MP is a single-platform, high-throughput, fully automated solution that enables the production of fine line and 3D photoresist patterns with unparalleled repeatability and accuracy. The system is made up of a vacuum load lock chamber, a programmable alignment unit, and a programmable spin coating mechanism. The machine features a digital-imaging tool for high-precision registrations and an LED-based light source for exposure. The vacuum load lock chamber ensures a clean asset environment and allows for tooling exchange without requiring atmospheric pressure. The programmable alignment model enables the automatic placement and alignment of the substrates in the process chamber. The spin coating mechanism is designed to apply photoresist films with consistent thickness and homogeneous films from the center to the edge of the substrate. The digital imaging equipment features high-precision registration for automatically measuring, aligning, and positioning of substrates and resists. It enables the registration accuracy of less than 0.5um. The LED light source separates the backlight and blacklight with different angles and exposure times, giving more flexibility to the exposure time and allows for repeated exposure with greater precision and accuracy. The MP is flexible enough to accommodate a variety of photoresist materials and is designed to position substrates of different thicknesses. The system is designed to reduce dust, contaminants, and particles per given area, and can be used in an array of photoresist processes such as negative and additive processes. In a nutshell, FSI Mercury MP is a versatile photoresist unit that delivers reliable production with high levels of repeatability, precision, and accuracy. It is a single-platform solution with high-throughput capabilities that provides maximum versatility and flexibility.