Used FSI / TEL / TOKYO ELECTRON Mercury MP #293622268 for sale

FSI MERCURY MP photoresist equipment is a production-scale machine produced by Ferro-Software Instruments (FSI). The system is designed to manufacture highly precise geometrical structures with very tight tolerances on the nanometer level. It is capable of producing features with a size ranging from 5nm to 150 μm, depending on the desired application. The machine comes with a standard resist processing chamber that allows for the resist to be spin-coated with the desired pattern before exposing it to the photoresist. The resist exposure chamber is equipped with two laser diode arrays and a movable aperture to enable precise exposure of the resist using a variable aperture exposure unit. The exposure process ensures that the exposed resist is uniform, thereby providing consistent results. After exposure, the resist is cured in the machine's curing chamber. The curing process is essential for ensuring that the resist maintains its structural integrity and adhesion to the substrate. MERCURY MP machine has an integrated dedicated heating unit for the curing process to ensure uniform exposure throughout the resist. The device also has an automated resist removal and rinse station. After removing the exposed resist, the resist is rinsed with a combination of deionized water and a resist remover to ensure clean and residue-free surfaces on the substrate. The automated rinse station also features an inline vacuum tool to draw out residual chemicals. Finally, FSI MERCURY MP comes with a standard scanning electron microscope (SEM) to allow for visual inspection of the patterned substrate. This additional tool is useful for evaluating the quality of the substrate to ensure that there are no defects before continuing with the next stage of the process. Overall, MERCURY MP is a highly precise, production-scale photoresist asset capable of producing highly precise geometrical structures on the nanometer level. It is designed to maintain tight tolerances, producing consistent results with minimal defects.