Used FSI / TEL / TOKYO ELECTRON Mercury MP #9281852 for sale

FSI / TEL / TOKYO ELECTRON Mercury MP Photoresist Equipment is a high-performance and versatile mask aligner developed to meet the highest photolithography requirements. FSI Mercury MP incorporates a wide range of features, including a mechanism for handling materials in strip form, a platform to support two substrates, automatic focusing and thickness control, a power-saving dry light source, high-accuracy scanning and automatic post-processing functions. TEL Mercury MP is equipped with an original "High Accurate Protrusion Sensor" that achieves high accuracy and fast measurement. The light source used is a He-Cd laser with a wavelength of 436 nm. The dry light source enables high power output and low energy consumption, and supports fast and accurate alignment for photolithography processes. TOKYO ELECTRON Mercury MP also supports one- or two-stage process of photolithography with the strip form material handling. Mercury MP includes a platform that can support two substrates, enabling simultaneous alignment and through-thickness measurement. The scanner used is a high accuracy linear ac servo motor that enables repeatable resolution to 0.5 µm. Its surface scan accuracy is also 0.1 µm, and the precision alignment for dot shape is also 0.2 µm. FSI / TEL / TOKYO ELECTRON Mercury MP also has automated processing such as edge coloring, scanning and concentration adjustment. The frame of the mask aligner is designed to ensure easy operation, and the base frame is designed to prevent vibrations. Additionally, FSI Mercury MP supports the integration of other sub-systems, making it possible to be used in fully automated photolithography applications. TEL Mercury MP is a user-friendly and advanced system that meets a wide range of applications. It is optimized for use in various industries such as flat panel display, solar cell, MEMS, and IC foundry. This unit is specifically designed for high productivity and consistent performance. The machine is equipped with a convenient user interface, powerful built-in measurement functions, and additional data processing functions to enhance the user experience. Furthermore, TOKYO ELECTRON Mercury MP is designed to meet environmental regulations and to minimize photocontamination and static electricity generation. This tool provides reliable measurements and fast and precise alignment, making it an ideal asset for photolithography.