Used FSI / TEL / TOKYO ELECTRON Mercury #9199857 for sale

FSI MERCURY is a photoresist equipment designed for the production of large-scale lithographic masks for the manufacture of integrated circuits (ICs). The system enables the photolithographic process to be completed with high accuracy and in a cost-effective manner. This photoresist unit is designed with micromirror projection technology to ensure a substantial degree of line flexibility and clearance control. The programmable mask writing machine produces 150nm feature size, and can store up to 8K designs. The dimension accuracy of film layers is within +/- 7.5nm, within +/- 0.5% maximum for 50mm devices and +/- 0.2% maximum for 200mm diameter devices. It is a fully automatic tool that can convert one design to several different masks quickly and easily. The reliable MERCURY asset allows for the precise control and accuracy when producing lithographic masks for larger ICs. It consists of a photomask model that uses light-emitting diodes (LEDs) to control the amount of exposure during the photolithography process. The equipment uses a combination of an optical transmittance grating and a highly reflective coating to ensure that the mask is characterized and matched to the substrate exactly, as well as to the design specifications. FSI MERCURY system also makes use of a computer-controlled beam-writing unit to ensure that edges and shapes are precisely defined. The machine also has a unique auto-tuning feature which facilitates accurate alignment of the mask design with the intended characteristics of the substrate layer. Finally, MERCURY tool has built-in QC options which allows users to quickly and effectively determine the integrity of the finished masks. This helps to ensure that only the highest quality masks are produced for integrated circuit manufacture. With its high accuracy, reliability and cost-effectiveness, FSI MERCURY is an essential tool for integrated circuit production.