Used FSI / TEL / TOKYO ELECTRON Mercury #9278150 for sale

FSI / TEL / TOKYO ELECTRON Mercury is a world-leading photoresist equipment used in the fabrication of integrated circuits (ICs). It utilizes advanced electron beam lithography technology to create sub-20-nanometer features in photoresist layers for a wide range of electronic applications. The system employs an integrated optical-coupled scanner and single-beam source operating at KHz scan frequency to provide high-definition, repeatable, and reliable lithography performance. The unit is based on e-beam and resists technologies developed by FSI, making it highly reliable and advanced. The advanced machine design is based on a robust architecture featuring a simplified tool control. The lithography process centers around a functional source and image asset. The source model is equipped with precise e-beam generation, control of intensity and dose as well as mechanical and programmed alignment functions to deliver pixel-perfect lithography. Furthermore, the equipment can conduct high-precision mask edge alignment, beam centering and beam shaping with no need for manual intervention. FSI Mercury system is equipped with automated and programmable process parameters allowing for consistency and repeatable results across multiple wafers and batches. The robust unit architecture is reinforced by the use of Quality Control (QC) peripherals to monitor process stability such as focus adjustment, beam current, etch depth, and more. Moreover, the machine utilizes a variety of standard process modules and high-end lithography tools to achieve greater customizability for complex chip structures. Furthermore, the tool is capable of meeting stringent accuracy requirements with a precision of better than 1nm for critical feature sizes. It incorporates an atmospheric scanner which can generate and align a 0.05-degree tilt angle for evenly distributed light profiles and high-quality images. The asset can also take advantage of integrated temperature and humidity controllers to improve stability and reduce overlay errors over time. TEL Mercury model is also compliant with industry standards, and is supported by a wide range of process modules ranging from single-layer resist production to multi-level metallization layers. Additionally, the equipment can integrate with a range of automation solutions and integrate in-line process monitoring and traceability devices such as camera-based defect inspection systems, review systems, and automated products loading and unloading systems. TOKYO ELECTRON Mercury system is an ideal choice for high-precision, high-resolution IC fabrication that requires stable, accurate and repeatable feature sizes. Thanks to its advanced features, it is adopted by multiple device manufacturers and research institutions across the world.