Used FSI / TEL / TOKYO ELECTRON Orion #9298710 for sale

FSI / TEL / TOKYO ELECTRON Orion is a photoresist equipment which is used for the development and imaging of photoresist patterns on semiconductor wafers. It is a fully automated tool / system that enables accurate patterning and resists development of wafers and substrates in the microelectronics industry. FSI Orion photoresist unit consists of an imaging station, a spin station, a hot plate station and an automated robot for part handling and movement. The imaging station consists of a laser automatic aligner, a mask aligner, a UV lamp, a stepper, and an image window. The laser automatic aligner is used to accurately align the mask onto the wafer. The mask aligner is used to image the mask onto the wafer while the UV lamp is used to provide the exposure for imaging. The stepper and the image window are used to monitor the patterning of the wafer. The spin station is used to transfer the photoresist from the wafer to the substrate as well as for developing the patterns on the wafer. The spinning is enabled by a motorized machine which can spin the wafer from zero to fifty thousand rpm. The hot plate station is used to bake a layer of photosensitive material over the patterned wafer. The robot is used to move the parts between the different stations. It has five axes of motion and is capable of programming and memorizing the path of motion for repetitive part movements. Overall, TEL Orion photoresist tool is a reliable and accurate tool that can handle the high-precision patterning and resists development needed for the microelectronics industry. It consists of various components such as an imaging station, a spin station, a hot plate station, and a robot, all of which work together to ensure accurate imaging and patterning on the wafer.