Used FSI / TEL / TOKYO ELECTRON Orion #9384186 for sale

FSI / TEL / TOKYO ELECTRON Orion is a next-generation photoresist equipment for semiconductor lithography. It is designed to accommodate the latest advances in technology such as extreme ultraviolet (EUV) lithography, deep UV (DUV) lithography and extended optical lithography. FSI Orion system features the latest advances in pattern writing, wafer management, exposure and post process. The unit is designed to provide industry-leading resolution and throughput, while also meeting the highest requirements for accuracy and precision. TEL Orion machine includes a multi-axis mask writing and alignment tool, along with a wafer loader/unloader asset and a stepper/scanner platform. The mask writing model consists of an imaging equipment with multiple wavelengths and high resolution, a substrate plate with multiple layers, and a mask alignment system that is capable of aligning at a sub-nanometer level. The wafer loader/unloader unit provides a capability to quickly and accurately load and unload substrates and plates. The stepper/scanner platform is capable of imaging ultra-fine patterns with high precision in a wide variety of lithography technologies. TOKYO ELECTRON Orion machine also features integrated metrology capabilities that allow for in-line process monitoring and control. The tool includes a dual wavelength metrology asset that can detect sub-nanometer features in the wafer. The dual wavelength metrology can also analyze wafer level residuals which allows for tighter process control. The model also includes an integrated process recipe library and advanced in-line process control to ensure consistent process performance. Orion equipment is designed to provide superior lithography performance with a cost that is competitive with other high-end lithography systems. The system is designed with a scalability that allows for modular expansion as needed, allowing upgrades to be easily implemented as new technologies or processes are introduced. The unit is highly flexible and can be easily configured to accommodate different lithography solutions. Furthermore, the machine has extensive remote support capabilities that allow for remote viewing of tool performance and upgrades. This allows for a higher level of customer service and support. Overall, FSI / TEL / TOKYO ELECTRON Orion is a leading photoresist asset designed to accommodate technological advances and provide industry-leading resolution and throughput. The model's flexibility, scalability, and remote support are key features that make it a competitive choice for semiconductor lithography.