Used FSI / TEL / TOKYO ELECTRON Orion #9384197 for sale

FSI / TEL / TOKYO ELECTRON Orion is a photoresist equipment used in the production of semiconductor components. Photoresist systems enable the precise conditioning of materials used to create components at the nanoscale level. FSI Orion system is a photoresist ashing, stripping and developing unit that is capable of dark field, reflective, and transmissive imaging. It provides enhanced precision and control through a combination of Vacuum Reactive Ion Etching (VRIE) and Non-Reflective Deposition (NRD) processes. This machine is designed to maximize process efficiency with rapid ashing times and fully automated sequence running. TEL Orion can process a variety of photoresist materials including polyimide, hydrogen silsesquioxane, photo-polymer, benzocyclobutene, and negative and positive photoresists. It is also capable of running multiple concurrent process operations, such as substrate cleaning, etching, etch back, stripping, resist curing, and temperature annealing. The tool is equipped with a 1.3 Gigawatt radio frequency source, with uniform etching rates across any substrate. The improved temperature accuracy, optimized plasma conditions, and use of gas mixing, gives end-users better process precision. In addition, the asset offers reliability and device integrity over a wide range of conditions, with an optional inline inspection model for real-time data collection. Orion is also fully automatable with FSI proprietary software, making it an invaluable tool for high-volume production lines. In addition, it is very easy to manage with automated material handling and run scheduling. As a result, users do not need to worry about manually entering data or constantly adjusting the hardware. Overall, TOKYO ELECTRON Orion is an advanced photoresist equipment that is designed to produce precise and efficient results capable of excellent device integrity over a wide range of process conditions. It is ideal for high-volume production and offers an automated, easy-to-manage process. With its rapid ashing times and enhanced precision, this system is an invaluable tool for any semiconductor manufacturing process.