Used FSI / TEL / TOKYO ELECTRON Orion #9395754 for sale

FSI / TEL / TOKYO ELECTRON Orion is a Photoresist Equipment specifically designed for developing and exposing thin films of polymers used for photoresist applications. The system has high-resolution patterning capabilities, and can be used for a variety of processes, from single die discs to reticles, large and medium area masks, general purpose chips and patterning processes. FSI Orion unit features an advanced low-angle film profiling feature with a patented "Full Width Adjustment" option for controlling film thickness. This allows for a high degree of control over the photoresist development, enabling the operator to precisely control the direction and shape of the pattern. TEL Orion machine is also capable of multiple mode exposing, allowing the user to choose between single, double or even triple exposure modes. This feature is advantageous when a potentially high variability exists in the size of a particular photoresist feature or when the formation of one or more particular photoresist features is potentially more difficult to achieve with a single exposure. TOKYO ELECTRON Orion tool also includes a two-dimensional Z-axis scanning feature which enables the user to reduce the number of exposure steps taken and ultimately decrease the time it takes to achieve a desired pattern. Additionally, the asset offers various process controls capabilities including temperature control, speed control, focus control and more. Orion model is also able to yield photoresist masks with higher quality and resolution than other systems due to the high speed spinner, high res digital camera and high-frequency scan interpolation capabilities. The combination of these features allows FSI / TEL / TOKYO ELECTRON Orion to produce photoresist masks with up to 1450 dpi resolution. The high resolution images produced by the equipment allow for higher mask accuracy and thus better accompanying lithographic results. Finally, FSI Orion Photoresist System is fully automated and comes with accompanying software for process parameter calibration and statistical process control. This allows the operator to easily monitor and adjust process settings in order to achieve optimal results. Therefore, TEL Orion is an essential tool for semiconductor µDRAM fabrication.