Used FSI / TEL / TOKYO ELECTRON PFA Turntable for Mercury MP #293650475 for sale

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ID: 293650475
Wafer Size: 8"
8" 4-Positions.
FSI / TEL / TOKYO ELECTRON PFA Turntable for Mercury MP is a photoresist equipment designed for production in the semiconductor manufacturing process. It is a stand-alone, single-axis equipment designed to deliver superior performance, superior speed, and superior accuracy. The Turntable's advanced motor technology produces high-precision linear motion and accuracy, which is important in the semiconductor industry. It features dual laser acceleration and deceleration connections, a patented low-oscilation feed-control system, and a self-centering base plate for easy installation. FSI PFA Turntable for Mercury MP can process a variety of prototye and production layer films, allowing for a wide range of lighting and contrast ratios for targeted applications. Its built-in air knife unit creates a reproducible air gap around the substrate within the processing chamber, providing effective and uniform cooling of the substrate. This feature aids in the critical surface freezing processes in the production process. It also utilizes the high-power mercury lamp, providing uniform and consistent illumination on the surface of the substrate, resulting in better uniformity. The Turntable is designed with a digital servo motor that is capable of producing high-precision linear motion and speed in both clockwise and counter-clockwise directions. This feature allows the machine to accurately rotate parts at high speeds. Additionally, the Turntable uses a digital laser alignment tool to ensure accuracy and uniformity. The high precision laser alignment asset allows the model to achieve a level of stability and accuracy that is required for advanced semiconductor processes. In addition to its superior processing accuracy, TEL PFA Turntable for Mercury MP is also equipped with a number of enhancing features. It features a scan bar equipment for maintaining the optimal machining envelope, a liquid cooling system designed to minimize thermal deformation, and a low-pressure holding unit that enables a clean and debris-free handling environment. It also comes with online self-diagnostic software, which assists in troubleshooting and maintenance. Overall, PFA Turntable for Mercury MP is a reliable and efficient photoresist machine for semiconductor production processes. It offers high-precision linear motion and speed, and features advanced motor technology and laser alignment systems for accurate and uniform processing. With its built-in features, this tool provides an effective, low-maintenance environment for the processing of prototype and production layer films.
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