Used FSI / TEL / TOKYO ELECTRON PFA Turntables for Mercury #293653294 for sale

FSI / TEL / TOKYO ELECTRON PFA Turntable for Mercury is a state-of-the-art photoresist equipment for semiconductor fabrication. It provides a high-performance solution for the advancement of lithography processes. This system uses a platform of ultra-precise turntables coupled with advanced Mercury High-End Photoresist Processing technology. FSI PFA turntable offers reliable upscale production, while allowing production of small structures as small as 25 nm. This unit provides superior precision, enabling resolution of complex patterns with excellent overlay accuracy. Its modular design allows for a wide range of customizable configurations. The turntable has a built in process station which enables the complete photoresist process. It includes an integrated hot plate, fountains, and an internal diffusion pump. The integrated hot plate has a high temperature capability with good uniformity. It also has a fast-moving hot plate, allowing fast turn times and efficient cycling. The fountains are designed to facilitate uniform liquid distribution and accurate dosage so that precise results are achieved. The diffusion pump helps to remove various unwanted particles from the process. FSI PFA Turntable for Mercury also features temperature feedback, meaning that temperature is continuously monitored. This helps minimize thermal and process drift, improving performance and consistency. Additionally, it has an integrated Laser Video Measurement Machine (LVMS) which initiates automatic data collection for better process control and recipe printing. This tool contains a 128-bit multi-directional encoder which provides precise control of the pattern position and orientation. Other features include an enclosed design and a cleanroom compatible stainless steel construction, ensuring a safe and clean operating environment. The PFA turntable is also compatible with other process tools, and offers a wide range of custom solutions. The combination of all of these components helps to provide repeatable and reliable processes with extremely accurate control of pattern alignment and parameters. Overall, TEL PFA Turntable for Mercury is a reliable and efficient photoresist asset ideal for semiconductor fabrication, offering superior precision and repeatability. Its modular design allows for a wide range of customizable configurations, and its high-temperature integration ensures a high-performance solution.