Used FSI / TEL / TOKYO ELECTRON Polaris 2000 #9158302 for sale

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FSI / TEL / TOKYO ELECTRON Polaris 2000
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ID: 9158302
Cluster spray coating / processing system Computer control Staubli unimaton robotic arm Nesting station Chill unit.
FSI / TEL / TOKYO ELECTRON Polaris 2000 is a high-precision photoresist equipment designed for advanced microfabrication applications. This system incorporates numerous features designed to improve its performance and output quality, allowing it to meet the requirements of most advanced semiconductor processes. FSI Polaris 2000 is equipped with a deep UV light source and a low temperature baking chamber. This ensures low particle and contamination levels during processing as well as accurate light exposure times. A high-precision mask aligner is also included, which guarantees precise production of intricate patterns and features. To ensure exact and repeatable results, TEL Polaris 2000 includes a number of features that enable precise control over the parameters of the photoresist process. These include user-defined recipes for the exposure and development processes, accurate mass flow controllers for the chemical baths, and an array of automated maintenance routines to keep the unit operating optimally over long periods of time. The thermal control machine included with TOKYO ELECTRON Polaris 2000 is also designed for a high level of precision and accuracy. This ensures consistent temperature and a flat temperature profile during the photoresist baking process, which is crucial for achieving uniform results. The built-in safety and ergonomic features help ensure operator safety and comfort. The tool includes automatic chemical bath level monitoring, automated venting, temperature safety interlocks, and user-friendly automation components. Overall, Polaris 2000 asset is an ideal solution for advanced microfabrication processes. Its combination of features make it highly precise and repeatable, and its safety and ergonomic features ensure that it is safe and comfortable to use.
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