Used FSI / TEL / TOKYO ELECTRON Polaris 3500 #293616823 for sale

FSI / TEL / TOKYO ELECTRON Polaris 3500 is a photoresist equipment used to produce microelectronic and optoelectronic components with exacting precision. The system utilizes an advanced stepper motor motion unit and proprietary software to accurately expose and remove specific areas of photoresist material contained on a substrate. The machine features an optimized focus magnet and low-noise shutter design allowing for submicron precision in the exposure process. The tool utilizes a beam-optimized illuminator, which is capable of producing light patterns and other image shapes at a very high resolution. This illuminator offers a wide range of light wavelengths and has the capacity to create highly repeatable and precise light patterns for better yield. Additionally, the illuminator has an aperture Illuminance monitor which enables accurate illuminance monitoring. The asset has a digital lens model for the projection optics. This allows for accurate positioning of the projection lens and provides the advantages of easy alignment, improved quality of repeating patterns, increased resolution, and uniform, repeatable performance over the entire field of view. The heart of the equipment is the 8-inch chuck stage, which can accurately position substrates during processing. Its multi-point chuck system is capable of holding substrates securely in-place while providing smooth motion with high repeatability. The stage comes equipped with sensors that detect the substrate size, type, and position as well as temperature measurement. The unit also boasts a multi-MESFET (Multi-channel, Electron-Selective-Field-Melting) film module which accurately exposes and removes the photoresist material from the substrate. This module supports multiple MESFET channels. along with the photoresist process module, the film module provides highly repeatable and precise control during the photoresist process. FSI Polaris 3500 is an innovative photoresist machine designed to produce microelectronic and optoelectronic components with highly precise accuracy. Its optimized illuminator, digital lens tool, chuck stage, and multi-MESFET film module provide unparalleled tooling capabilities and production accuracy.