Used FSI / TEL / TOKYO ELECTRON Polaris #9092981 for sale
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FSI / TEL / TOKYO ELECTRON Polaris is an advanced photoresist equipment for integrated circuit fabrication. Photoresist is a technology used to transfer patterns and structures to substrates in the fab process. This particular tool is a superior tool in terms of speed, resolution, and capacity. The internals of the system are built with an advanced, high-speed semiconductor processor. This is the core of the unit which performs essential functions such as operation, data transfer and image processing. There is also a highly sensitive optical machine consisting of a scanning laser and to lenses, acting together with a deflector mirror to ensure precise imaging. The tool is integrated with a dual beam scanner and with Mitsubishi's patented solution-focused imaging technology, FSI Polaris can deliver up to 2.5X faster imaging performance than its predecessor. The asset includes temperature control and a host of other features. The model is also built with an optimized exposure time, to ensure that the photoresist does not create any dark defects or residues. Apart from its speed and imaging precision, this equipment includes a unique mask stage feature. This feature enables the user to adjust the height and tilt of the photomask during imaging, allowing for precise adjustment of the critical dimension (CD) of submicron features. TEL Polaris also supports a wide range of E-Beam and Laser technologies, providing more flexible lithography options than competitive technologies. Also, the system houses some unique advanced camera technologies, allowing the user to view the entire wafer coverage in real-time. This makes it possible to identify and correct defect locations making the control of the wafer process much more efficient. In terms of safety, the unit utilizes an advanced multi-layer safety protection feature, which ensures that safety regulations are abided by, and important components of the machine are protected from damage due to electromagnetic interference. All in all, Polaris, is a one-of-a-kind photoresist tool, offering superior results and a wide range of options. It has proven itself to be an excellent choice for integrated circuit fabrication.
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