Used FSI / TEL / TOKYO ELECTRON Saturn MP #9233648 for sale

FSI / TEL / TOKYO ELECTRON Saturn MP is a versatile photoresist equipment used in semiconductor manufacturing and advanced lithography processes. It is designed for a wide range of tasks, such as semiconductor processing, microelectronic device fabrication, nanotechnology, advanced lithography and other surface-mount areas. The system offers a comprehensive solution for wafer fabrication, including patterning, alignment, etching, metrology and deposition. Its state-of-the-art features allow it to meet the stringent requirements of today's semiconductor industry. FSI Saturn MP unit consists of three core components: the main controller, a set of process modules, and a robotic arm, for loading and unloading wafers from the machine. The controller is responsible for controlling all of the processes and interfacing with external machinery, including mask aligners, stepper motors, resist rollers, spin-coaters, atmospheric monitors, and a range of other accessories. The process modules provide all of the necessary power, heating and cooling functions to support the photolithography process. The robotic arm is responsible for loading and unloading wafers and can be adjusted for a range of wafer sizes. TEL Saturn MP provides a variety of advanced features to maximize efficiency and minimize downtime. It includes a multi-template user interface for rapid pattern adjustments, as well as document management and statistical reporting. It also offers single-click wafer-handling for quick access to wafer start-up parameters, and a comprehensive recipe-management tool for remote editing and management of photolithography recipes. The asset also offers optional off-line traceability to monitor and record various wafer steps for quality assurance. TOKYO ELECTRON Saturn MP is compatible with a variety of resist chemistries, including polymers, continuous-tone and photoresists. It has an industry-leading full line of consumable and spare-parts product line and a committed technical staff to provide customer solutions and support. This ensures that the model can keep up with the most demanding application requirements while ensuring safety and top-level performance.