Used FSI / TEL / TOKYO ELECTRON Saturn #293746517 for sale

FSI Saturn is a photoresist equipment designed for microfabrication applications. It is an inline lithography system, which means that it is capable of direct-write, maskless exposure for simplified production processes. The unit consists of a directed beam of light source, along with a two-dimensional x,y motor stage, a less diffraction-limited optical cage, and a wafer transport machine. The tool also includes a controller with an intuitive graphical user interface and a PC-based software window for point-and-click operation. Saturn includes a variety of microlithography techniques, such as proximity exposure, contact exposure, step-and-repeat non-contact exposure, auto-focus non-contact exposure, lid illumination, scanner exposure, and single or multiple die exposure. It also features an image positioning asset with the ability to perform high-precision alignment of the reticles and wafers. The complete model is optimized for production runs of small to medium panels in a single layer sub-micron to multi-layer sub-micron resolution. It can easily handle a wide range of exposure applications, from conventional photoresists and thick resist to dry film, thin film, and bulk photoresists. The equipment is also capable of processing a wide range of materials, such as thick positive photoresist, negative photoresist, metal-based resist, and organic materials. It is designed for inline quality control with a built-in susceptibility meter and automated wafer thickness measurement. FSI Saturn system is equipped with an upgradeable dual LED illuminator, with adjustable current and wattage, for a full range of exposures. The unit is sold with optional online help, training, technical support, and compatible consumable items. Its modular design ensures easy customization for specific photolithography processes. Saturn provides quick, simple, and precise operation with its enhanced imaging and exposure capabilities, in a small package and at a fraction of the cost of a full-blown photolithography machine. Suitable for production of small to medium complex patterns, the tool is the perfect choice for those seeking high-resolution patterns and geometry, without the need for cumbersome and expensive systems.