Used FSI / TEL / TOKYO ELECTRON Saturn #293748011 for sale

FSI Saturn is a photoresist equipment used for microlithography to produce photomasks, which are then used to transfer patterns to semiconductors and other electronic components. Saturn system utilizes a proprietary excimer laser that emits a deep UV light to create photomasks from photoresists. Photomasks are produced using a double-exposure process in which the excimer laser is used to expose the photoresist twice, with an intermediate step of baking the photoresist between exposures. The photomasks produced by FSI Saturn unit are incredibly precise, with a resolution of 0.25 microns, and uniformity of 12.5 nanometers. The machine's ability to expose shallow features down to 0.2 microns, as well as features across a photomask that are uniform in shape and size, makes it suitable for the most advanced semiconductor fabrication processes. Saturn tool is compatible with both standard and advanced photoresists, and is designed to accommodate a wide range of mask designs and materials, allowing manufacturers to create highly accurate and intricate photomasks for a variety of applications. The asset also includes a suite of software tools, such as process recipes, exposure durations, and model controls, that enable users to easily create their desired patterns with minimal effort. Additionally, FSI Saturn equipment is capable of pre-qualification of materials and processes prior to going into production, so that users can reassure that their designs will meet the expected quality specifications. This helps to reduce time wasted in the development phase, as well as ensure that the photomask will be of optimal quality when it is ready for use. Saturn system is an invaluable tool for the fabrication of advanced microelectronic components, offering a high degree of accuracy and performance in a user-friendly platform.