Used FSI / TEL / TOKYO ELECTRON Saturn #293811533 for sale

FSI Saturn is a high performance photoresist equipment designed for advanced lithography processing of advanced IC technologies. The system consists of a high-resolution digital imaging unit coupled to a high-speed thermal/vacuum processing station. It enables high-precision imaging and etching capabilities for the creation of sub-micron, high-aspect ratio features on semiconductor wafers. Saturn offers a combination of digital imaging and thermal/vacuum processing technologies to deliver extremely accurate, repeatable and reliable lithography results. It utilizes a proprietary digital image acquisition machine that features optically corrected, full-field and large-area imaging capabilities in a single exposure. In addition, it offers an advanced set of integrated resolution enhancement techniques (RET-E) tools to achieve key sub-micron lithography capabilities. The tool includes a high-end vacuum processing station and thermal processing control unit along with an intuitive multi-zone control panel. This allows for precise, repeatable and accurate control of processing parameters, resulting in very high-yield products with superior uniformity and process results. FSI Saturn also features a large active area and a wide variety of sample handling options to accommodate multiple layers of processing. The asset is designed to deliver rapid imaging and processing turn-around times, with a total cycle time of just 1-2 minutes. Furthermore, it has an integrated model for monitoring, logging and analyzing data, leading to significant cost savings. The equipment has been designed for low operating costs and ease-of-operation, providing a full range of lithography options in a compact solution. Saturn is a cost-effective, feature-rich photoresist system designed for advanced lithography processing capabilities. It provides highly accurate and reliable imaging and etching results using its proprietary digital image acquisition unit and advanced resolution enhancement techniques. With its fast processing times and integrated machine for data analysis, FSI Saturn is an ideal solution for high-end manufacturing and research applications.