Used FSI / TEL / TOKYO ELECTRON Saturn #9236451 for sale
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ID: 9236451
Wafer Size: 6"
Systems, 6"
(4) Cassettes
Does not include DI Water heater
Flow pickup
Canisters:
(2) Chemical canisters for system 1:
H2SO4
H202
HCL
(2) Chemical canisters for system 2:
H2SO4
H202
HCL
HF
NH4OH.
FSI / TEL / TOKYO ELECTRON Saturn is a photoresist equipment designed for a variety of applications, including photolithography, metrology, optical and electrical contact imaging, and defect inspection. It offers a range of features for a variety of applications, from its high-resolution imaging capabilities to its advanced automation and computer-assisted analysis capabilities. The system is built around a novel optical layout featuring a variable-gap source/detector unit, allowing the machine to detect signals of varying size and shape. This optical layout, combined with a high-speed imaging tool and an automated wafer analysis asset, makes FSI Saturn a powerful tool for high-precision image capture and characterization. TEL Saturn model is a 16-bit-resolution digital imaging and control equipment, which can be operated with a range of different computer platforms. It offers a wide field of view (6.5x6.5mm) for imaging large objects and surfaces, and provides a resolution down to 0.8 microns. Its variable-gap source/detector system allows for optimum image clarity and accuracy in a wide variety of physical environments. The unit is also capable of recognizing up to 16 patterns during automated inspections, including semiconductor pyramids and cylindrical structures. At the core of the machine is its patented, advanced image-capture techniques, which allow for remarkably precise imaging and signal-analysis capabilities. Saturn is capable of measuring wavefront distortion and image contrast, by using a specialized linear encoder that reads a high-resolution digital signal from the image-capture hardware, along with its patented interferometer technology for analyzing surface topology. This combination of features make it possible for the tool to detect defects as small as 0.5 microns wide, and to measure individual structures on the order of 200 microns thick with remarkable precision. TOKYO ELECTRON Saturn's automation asset is designed to ensure that all of its components are working together to produce high-quality images on a continuous basis. The model includes intelligent algorithms for self-calibration, automated process control, and predictive maintenance, making it an ideal solution for precision control applications. Moreover, FSI / TEL / TOKYO ELECTRON Saturn's custom software package includes tools for both interactive and batch-modification image analysis. In short, FSI Saturn photoresist equipment represents a powerful capability for capturing and characterizing images of high precision. Its variable-gap source/detector system, fast imaging unit, automated wafer analysis machine, and advanced self-calibration and predictive maintenance capabilities make it an ideal platform for many advanced manufacturing processes. TEL Saturn tool's precise characterization of surface topology and its detection of small defects make it an invaluable asset for many industries, from semiconductor fabrication to printing and miniturization processes.
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