Used FSI / TEL / TOKYO ELECTRON Zeta 300 G3 #293600179 for sale

FSI / TEL / TOKYO ELECTRON Zeta 300 G3 is a high-performance photoresist equipment designed for electronic device fabrication. It brings together advanced hardware and software solutions to deliver the highest possible accuracy and throughput for modern semiconductor fabrication. The system is capable of the highest-accuracy lithographic imaging, plus cleaning, baking, and processing of photoresist materials. The illumination source is a triple-wavelength LED array. The LED's are independently adjustable to provide three different depths of field, enabling excellent focus and maximum resolution. The automated substrate table allows for the highest-accuracy delivery of the photoresist material, without having to manually set the focal position. This results in optimal process accuracy and repeatability. The photoresist processing chamber is equipped with a range of heated platens, allowing for "warm" and "hot" bake operations, as well as pre-etch processing. The chamber also features a vacuum unit, allowing for optimal control of moisture levels and other features, such as thermal diffusion. The chamber is further supported by a specialized recirculating cooling machine, ensuring the highest levels of precision and thermal regulation. The high-precision stepper motor and stage alignment tool, along with automated wafer transmission, minimize misalignments and the overall risk of "Through Silicon Via" (TSV) defect formation. This ensures efficient fabrications with minimal user intervention. Furthermore, the asset's comprehensive software suite offers comprehensive adaptability and configurability. The model supports a wide range of photoresist systems, with settings that can be optimized for each specific recipe. This also allows for the easy setup of complex recipes for low-impact processes, such as self-aligned double patterning. In summary, FSI Zeta 300 G3 photoresist equipment is a highly advanced system designed for the production of highly accurate semiconductors. Its advanced illumination, heating, and cooling capabilities, combined with its comprehensive software suite, enable it to achieve consistent and repeatable production results.