Used FSI / TEL / TOKYO ELECTRON Zeta 300 G3 #293600195 for sale
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ID: 293600195
Wafer Size: 12"
Vintage: 2007
Spray cleaning system, 12"
2007 vintage.
FSI / TEL / TOKYO ELECTRON Zeta 300 G3 Photoresist Equipment is a resist strip device used to pattern semiconductor ICs (Integrated Circuits) used in the manufacture of computer chips. The device is designed to strip high-resolution features with a minimum amount of feature distortion. This is achieved by presenting a uniform and consistent resist profile to the photoresist used on semiconductor substrates. The system consists of a resist strip chamber containing a series of resist strips. Uneven resist strips are created by sequentially moving the resist strips and exposing them to a light beam in the beam forming unit, where the resist strip profile is modified in an evenly spaced manner. The resist strip chamber further contains a heating plate, ensuring a uniform temperature distribution. The resist strip chamber is made from stainless steel and contains an internal heating plate. To protect the resist strip profile from distortion, the heating plate is designed to evenly and gently heat the surface of the resist strips. Furthermore, advanced temperature control technology preserves the uniform temperature distribution of the resist strip. FSI Zeta 300 G3 Photoresist Unit is equipped with a light forming unit and a light detection unit. The light forming unit is the core of TEL Zeta 300 G3 Photoresist Machine and is used to create the resist strip profile. The laser light beam generated by the light forming unit is spread over the width of the resist strips, while a light detection unit measures the changes in the resist strip profile. By allowing precise control over the width of the resist strips, this ensures that the resist strip profile is accurately created. Finally, TOKYO ELECTRON Zeta 300 G3 Photoresist Tool is equipped with a asset control panel which allows for precise control over the operating temperature and the resist strip width. Furthermore, the panel can also be used to monitor the status of the model. Zeta 300 G3 Photoresist Equipment is the ideal tool for precision IC (Integrated Circuit) manufacturing and is the perfect solution for achieving superior resist strip profiles for semiconductor ICs. This system not only ensures that the resist strips are precise and evenly spaced, but also utilizes advanced technology to protect the resist strip profile from distortion. Additionally, with its easy to use unit control panel, precise control over the resist strip profile can be achieved. All these features make FSI / TEL / TOKYO ELECTRON Zeta 300 G3 Photoresist Machine the perfect solution for achieving high-resolution resist strip patterns.
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