Used FSI / TEL / TOKYO ELECTRON Zeta 300 #9158152 for sale

FSI / TEL / TOKYO ELECTRON Zeta 300 is a high-performance photoresist equipment that can etch, develop, and print substrates in a single integrated platform. The system features advanced etch rate and accuracy as well as excellent compatibility with today's most advanced photoresist materials. FSI Zeta 300 integrates FSI and TEL high-efficiency UV sources with high-speed patterning and imaging capabilities. The unit can handle substrates up to 200mm in size and offers rapid sample access, high-density patterning at high throughput. TEL Zeta 300 offers a variety of etching options with adjustable irradiance, uniformity of illumination, and advanced trim-etch capabilities. The integrated UV source can deliver fast, high-quality etch rates as well as efficient patterning. The machine is also equipped with powerful automation capabilities including programmable exposure parameters, patterning masks, and automatic substrate handling. The tool also features advanced ultra-fine control capabilities, allowing precise adjustment of etch rates, over cleanliness, and residual resist ratio. This is accomplished through a combination of features such as direct control of exposure parameters, adjustable illumination uniformity, and true high-precision, low-distortion patterning and imaging. TOKYO ELECTRON Zeta 300 offers excellent compatibility with photoresist materials such as those used in semiconductor, MEMS, and high-frequency devices. The asset also ensures a high degree of reliability with its automated process control capabilities. The model is designed for reliability and offers hot/cold cleaning cycles, automatic substrate surface characterization, and substrate protection features. Zeta 300 also boasts energy saving capabilities, reducing process cost while meeting increasingly stringent environmental regulations. The equipment not only conserves resources but also reduces exposure of workers to hazardous materials. The system also offers advanced data accounting and record keeping for monitoring the process. In conclusion, FSI / TEL / TOKYO ELECTRON Zeta 300 is a state-of-the-art photoresist unit that boasts superior etching accuracy, rapid sample access, high-density patterning at high throughput, and advanced ultra-fine controls. The machine is excellent for semiconductor, MEMS and high-frequency devices. The tool also ensures energy savings, worker safety, process cost reduction, and process monitoring capabilities.