Used FSI / TEL / TOKYO ELECTRON Zeta G2 #9204590 for sale

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ID: 9204590
Vintage: 2004
Spray cleaning system Type: Semi-auto Main unit: Process module Fluid delivery module Canister console 1 / H2O2, NH4OH, solvent Canister console 2 / HCL, HF, H2SO4, H2SO4 Semi-auto type facade Power distribution cabinet 40 KVA, 200V-230V Transformer 70 KVA, 200V-480V Transformer UPS Misc: 2P PFA Turntable, 12" 4P PFA Turntable, 8" (2) Process cassettes, 12" (4) ViPR Process cassettes, 12" 2004 vintage.
FSI / TEL / TOKYO ELECTRON Zeta G2 is a photoresist equipment designed with advanced proprietary technology to provide etching and lithography capability for processes such as MEMS, the semiconductor industry. FSI Zeta G2 offers superior edge acuity and high resolution to help manufacturers produce top-notch products. It integrates two fundamental technologies for atomic layer deposition and process control to create an advanced photoresist system. TEL Zeta G2 is an atmospheric-pressure etcher configured with the latest plasma source technologies to provide precise and uniform etching. It is designed to etch films more accurately and reliably, while also providing high aspect ratio etching and high etch rate uniformity. The unit also has an improved vacuum chamber PID controller that helps enhance etching in different process conditions. Zeta G2 also has a systems-based approach to lithography that combines high aspect ratio etching, precise wafer alignment and overlay accuracy. It is configured with a high throughput lithography trace to help ensure uniform and repeatable patterning performance during the etching process. Additionally, it has an advanced automated optical metrology that helps enable more precise measurements of process results. TOKYO ELECTRON Zeta G2 also comes with a fully automated cluster tool that helps reduce costs by reducing the number of manual adjustments needed during the process. This automate cluster tool helps enable a faster process time with fewer failures due to inaccurate etching or lithography. The cluster tool also helps standardize process recipes, allowing users to set up multiple processes in a single run. Overall, FSI / TEL / TOKYO ELECTRON Zeta G2 is an advanced photoresist machine that offers excellent etching and lithography capabilities for processes such as MEMS fabrication. It is designed with proprietary technologies for etching and lithography, an advanced automated cluster tool, an improved vacuum chamber PID controller, and an automated optical metrology to help ensure more accurate results. With FSI Zeta G2, manufacturers can achieve high-quality products in a more time- and cost-efficient manner.
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