Used HITACHI PR stripping system #293670389 for sale

HITACHI PR stripping equipment is a photoresist removal system that uses proprietary technologies from HITACHI High-Technologies Corporation. The unit is designed for use in a wide range of semiconductor and thin-film device fab processes. The machine is also suitable for use with dielectric layers, photoresists, and other organic residues. The tool is highly reliable and can strip photoresist quickly and efficiently. It uses a combination of infrared (IR) light, UV light, and dry heat. The combination of the three components allows for both hot and cold dry stripping. The asset utilizes infrared technology, which delivers localized, controlled energy and precisely detects the layer of photoresist. The UV component enhances the etching process by providing non-contact chemical activation of the photoresist and enabling precision stripping. The heater can be used to provide hot stripping of photoresists and dielectric layers. The model is based on optimized parameters to enhance the stripping quality and is characterized by its low wafer-to-wafer variation. It is designed to minimize particle and defect formation while achieving high-throughput. The equipment includes "three-dimensional" heating capabilities with an oscillation of the inner and outer heating elements to ensure uniform distribution of the heat. This ensures a uniform bypass rate. Additionally, the special film that is applied to the sample to increase light transmission enhances the detection accuracy of the infrared and UV components. The system comes equipped with a touchscreen interface that allows the user to monitor, change, and store the parameters of the process. It also has temperature control, pressure control, and layer thickness monitoring. The unit can be used for a variety of photoresist removal processes, including photo-lithography, litho-etching, and dry etching. It is also suitable for use with dielectric and organic residues. The machine is highly reliable and provides fast and accurate stripping without sacrificing quality or throughput.