Used KARL SUSS ACS 200 Plus #9300428 for sale

KARL SUSS ACS 200 Plus
Manufacturer
KARL SUSS
Model
ACS 200 Plus
ID: 9300428
Wafer Size: 6"
Coater / Developer system, 6".
KARL SUSS ACS 200 Plus is an automated photoresist processing equipment. It is a robust system which is used to process chemical and mechanical lift-off of thin film materials such as photoresists, metals and dielectrics. This photoresist unit features an optimized design for reliable and repeatable results with a simple, user-friendly operation. This automated machine can process up to 12 wafers simultaneously, achieving an even coating thickness and excellent linearity. The tool offers advanced, precise process control with repeatable, predictive results which is key for cost-effective photolithographic processes. The asset features a chemical management model which ensures a safe, secure operation by recording chemical concentrations throughout the process. This equipment also features an automatic topping pump, which refills the processing chamber with clean chemical with a precisely calibrated concentration. ACS 200 Plus has the latest in advanced rinse technology, providing precise and reliable rinse spiking as well as rinse control. It also includes an advanced 6-channel spin controller for optimizing the spin process with simultaneous and independent speed control for each channel with varying acceleration and deceleration times. The photoresist system also features advanced programmability which allows for precise optimization of recipes with custom accelerations and decelerations. In addition, the controller can also simulate processes before they are committed to the wafers, ensuring optimal performance and repeatability. KARL SUSS ACS 200 Plus is a highly reliable and efficient photoresist unit with many innovative features. It enables reliable and repeatable lithographic processing with precision spin coating, programmable chemical management and advanced rinse control. The machine is capable of handling high-precision photolithography processes and is an invaluable tool for cutting-edge semiconductor fabrication.
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