Used KARL SUSS / MICROTEC ACS 200 Gen3 #293763464 for sale
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ID: 293763464
Vintage: 2021
Coater system
Power supply: 380 V, 7.0 A, 16.0 A(2), 50 Hz, 3 Phase
2021 vintage.
KARL SUSS / MICROTEC ACS 200 Gen3 is a highly advanced and versatile photoresist equipment designed for precise and efficient photolithography processes. This sophisticated tool integrates cutting-edge technology to meet the demanding requirements of the semiconductor industry, enabling researchers and manufacturers to achieve high-resolution patterning and excellent process control. At the heart of MICROTEC ACS 200 Gen3 system is a state-of-the-art proximity aligner capable of providing sub-micron alignment accuracy, ensuring the alignment of photomasks and substrates with exceptional precision. This allows users to achieve tight overlay control and enables the creation of complex patterns with high fidelity. The unit features advanced alignment algorithms and real-time monitoring capabilities, which contribute to optimal process performance and improved yield. KARL SUSS ACS200 GEN3 is equipped with a high-intensity UV exposure machine, which delivers uniform and consistent illumination across the entire surface of the substrate. This results in reliable and reproducible exposure of the photoresist, leading to consistent pattern transfer and enhanced device performance. The tool offers flexibility in exposure dose and time, allowing users to tailor the process parameters to meet specific requirements for different applications. To support a wide range of substrate sizes and shapes, ACS 200 Gen3 features a versatile chuck asset that accommodates various wafer sizes and materials. The chuck design ensures excellent flatness and thermal stability, crucial for achieving uniform and consistent exposure across the entire substrate surface. Additionally, the model is equipped with a temperature control equipment that maintains the substrate at the desired temperature throughout the photolithography process, further enhancing process repeatability and uniformity. KARL SUSS ACS 200 Gen3 incorporates advanced automation and software control capabilities, streamlining the photolithography workflow and reducing operator intervention. The user-friendly interface allows for easy programming of exposure patterns and process parameters, while real-time monitoring and diagnostic tools provide insights into system performance and process optimization. The unit also supports seamless integration with other equipment and software platforms, enabling enhanced process control and data management for efficient production workflows. In addition to its performance capabilities, MICROTEC ACS200 GEN3 is designed with reliability and maintainability in mind. The machine features robust construction and high-quality components, ensuring long-term stability and minimal downtime. Regular maintenance and calibration procedures are straightforward, facilitated by clear documentation and built-in diagnostics, minimizing tool downtime and ensuring consistent performance over time. Overall, KARL SUSS / MICROTEC ACS200 GEN3 photoresist asset represents a cutting-edge solution for high-precision photolithography applications in the semiconductor industry. With its advanced alignment and exposure capabilities, versatile substrate handling, automation features, and robust design, ACS200 GEN3 offers users a powerful tool for achieving superior patterning results, improving process efficiency, and enhancing overall productivity in semiconductor fabrication processes.
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