Used KARL SUSS / MICROTEC ACS 200 #293619870 for sale
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ID: 293619870
Vintage: 2013
(2) Coater / (2) Developer system
Includes:
Chiller / Canister tank
Loader / Unloader
2013 vintage.
KARL SUSS / MICROTEC ACS 200 is a photoresist equipment suitable for a wide range of applications including photolithography and wafer exposure. The unit enables users to easily access and adjust settings for UV light intensity and exposure times. MICROTEC ACS200 features a convenient design, with an integrated exposure chamber, light shield and a field-proven linear stepper motor that allows users to accurately position the wafer while ensuring maximum exposure uniformity and repeatability. Additionally, this system boasts shutter-less operation that eliminates mask changes, along with an adjustable lamp mechanism to aid in vertical focus adjustment. The power of KARL SUSS ACS-200 is supported by MICROTEC advanced imaging software which provides a comprehensive exposure parameter database with fully programmable functions. This feature enables ACS 200 to print up to 5 masks per exposure in one single run, along with the capability to store exposure settings for multiple wafer sizes. KARL SUSS ACS200 also features a vacuum chuck for advanced wafer exposure accuracy and fast exposure rates. The exposure chamber is suitable for a variety of substrate shapes and sizes, and is equipped with two integrated control systems, one for stage and exposure control and the other for shutter control. Furthermore, temperature stability helps to ensure reproducible results. KARL SUSS ACS 200 incorporates an integrated liquid cooling unit to help maintain a narrow temperature range for high sensitivity results. In summary, MICROTEC ACS-200 photoresist machine is an advanced, high-performance tool offering advanced features and reliability. It enables users to accurately execute a variety of exposure processes while maintaining uniformity, repeatability and temperature control.
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