Used KARL SUSS / MICROTEC ACS 200 #293756494 for sale
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ID: 293756494
Wafer Size: 4"-6"
Vintage: 2001
System, 4"-6"
Photoresist developer, 2"-8"
(2) Photoresist dispenses
Vapor prime hot plate
(5) Hot plates
(4) Chill plates
(2) Cassette elevators
(2) Standard robots
Wafer backside rinse
CE Marked
Cassette
2001 vintage.
KARL SUSS / MICROTEC ACS 200 is a photoresist processing equipment that has been designed to allow for precision mask creation and coating-stripping of substrates. The system is a full-featured, automated wet-process unit, capable of high-speed mask processing to create fine line, high quality images in a wide variety of applications, from lithography to MEMS. The machine is composed of three main parts: the mask processor, mask cleaner and a developer. MICROTEC ACS200's mask processor provides uniform illumination for highly precise mask fabrication, with an option for either top or bottom exposure. In addition, MICROTEC D-acid wet-process chemistries are used to flush, remove or replace residual chemicals and particles from masking plates. This process allows for uniform and effective processing of masks. KARL SUSS ACS-200's mask cleaner ensures the highest quality cleaning of resist coating surfaces. The memory-programmed control tool allows for precision cleaning of mask surfaces with membrane filter technology, ensuring high contaminant removal before baking and developing. KARL SUSS ACS200's developer is capable of executing a wide range of developing steps, including backside (low energy) development, top-side (high energy) development, light flood (low energy) and chemical bath flooding (high energy). This allows for precise control of the development process, with the ability to control the amount of time spent on each step. ACS 200 is an ideal solution for applications such as micro-lithography, wet chemical processing, mask making and prototyping. The asset allows for process repeatability and precise control of the development process. With its advanced control program, KARL SUSS / MICROTEC ACS200 can handle a variety of mask fabrication processes, ensuring that the highest quality images are produced.
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