Used KARL SUSS / MICROTEC ACS 200 #9207173 for sale
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KARL SUSS / MICROTEC ACS 200 is a photoresist equipment designed for several applications ranging from thin film device fabrication to thick photoresist patterning. This system utilizes a micrometer site and a single vertical stage to enable the user to effectively process substrates up to a size of 8 inches. The use of a 133 mm XY/tilt automotor coordinate unit ensures accurate and reliable movements for patterning. Furthermore, a spin chuck coupled with the machine's rotation capability allows for a uniform application of photoresist to the substrate. MICROTEC ACS200 includes several features for optimised user performance. The tool features a crystalline quartz process chamber which ensures tight control over the film deposition process and mitigates the risk of contamination that is typical in unbaked resist process systems. Its pivoting door consists of a four-curved-glass design which enhances the overall safety as well as visibility for the user. In addition, this photoresist asset is controlled by a powerful controller that provides access to a variety of patterning programs which are pre-loaded for ease of customization to the user's requirements. KARL SUSS ACS-200 can be used for a wide range of processing applications including: negative, intermediate, and positive resist development; vacuum deposition of thin film devices; chemical dry etching; ashing processing; and stackable resist processes. The model's cataloged processes and recipes are also loaded into its controller which eliminates the time investment needed for the user to coordinate tools and wafers. In addition, the entire photoresist setup is built with robust, all aluminum construction to prevent corrosion and is appropriately coated with a corrosion-resistant black epoxy paint. Ultimately, KARL SUSS / MICROTEC ACS200 is a reliable photoresist equipment that provides users with a range of precision processing capabilities. Its micrometer stage and single vertical stage provide accuracy for processing any sized substrates, while the advanced controller enables users to access a variety of programs and processes. The system is also designed to reduce contamination risks and provide a safe and easy use environment.
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